Molecular dynamics simulations of sub-10 nm wavelength surface rippling by CF3+ ion beams

Plasma Sources Science and Technology

Volumn 19, Issue 4, 2010, Pages

  Végh, Joseph J ^a,b   Graves, David B ^a  

^a University of California   (United States)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLES OF INCIDENCE; FORMATION MECHANISM; INCIDENCE ANGLES; INITIAL MORPHOLOGY; MOLECULAR DYNAMICS SIMULATIONS; NORMAL INCIDENCE; RIPPLE FORMATION; SURFACE RIPPLES; SURFACE RIPPLING;

IONS; MOLECULAR DYNAMICS; MORPHOLOGY;

ION BOMBARDMENT;

EID: 77953797791     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/4/045005     Document Type: Article

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