Precise motion control of a piezolelectric microgripper for microspectrometer assembly

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009

Volumn 6, Issue , 2010, Pages 769-776

  Rabenorosoa, Kanty ^a   Clévy, Cédric ^a   Lutz, Philippe ^a   Das, Aditya N ^b   Murthy, Rakesh ^b   Popa, Dan ^b  

^a FEMTO ST INSTITUTE   (France)

^b UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT ALGORITHMS; BEAMSPLITTERS; BENCHMARK APPLICATIONS; FOUR-DEGREES-OF-FREEDOM; FTIR; GLASS COMPONENTS; HYBRID SILICON; JACOBIANS; MATERIAL SCIENCE; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICRO-SPECTROMETER; MICROGRIPPER; MODELING AND CONTROL; OPTICAL ALIGNMENTS; OPTICAL BENCH; PRECISION ALIGNMENT; ROTATIONAL DEGREES OF FREEDOM; SERVOING; WAVELENGTH DETECTION;

ALIGNMENT; BENCHMARKING; FOURIER TRANSFORMS; MECHANICS; MOEMS; WAVELET TRANSFORMS;

GRIPPERS;

EID: 77953764851     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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