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Volumn 17, Issue 2-4, 2006, Pages 549-556

Piezoelectric PZT films for MEMS and their characterization by interferometry

Author keywords

Interferometer; Laser scanning vibrometer; Piezoelectric coefficients; PZT; Sol gel

Indexed keywords

ENERGY DISSIPATION; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SOL-GELS;

EID: 33847214974     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-6707-4     Document Type: Conference Paper
Times cited : (10)

References (21)
  • 20
    • 33847198243 scopus 로고    scopus 로고
    • http://www.ferroperm-pizeo.com, Full Data matrix.
    • http://www.ferroperm-pizeo.com, Full Data matrix.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.