CMOS-integrated film bulk acoustic resonators for label-free biosensing

Sensors

Volumn 10, Issue 5, 2010, Pages 4180-4193

  Nirschl, Martin ^a,b   Rantala, Arto ^c   Tukkiniemi, Kari ^c   Auer, Sanna ^c   Hellgren, Ann Charlotte ^d   Pitzer, Dana ^a   Schreiter, Matthias ^a   Vikholm Lundin, Inger ^c  

^a SIEMENS AG   (Germany)

^b ETH ZURICH   (Switzerland)

^c VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^d Biosensor Applications Sweden AB   (Sweden)

Author keywords

Biomolecular interaction analysis; Biosensor; CMOS; DNA; FBAR; Film bulk acoustic resonator; Label free; Thickness shear mode; TSM

Indexed keywords

BIOMOLECULAR INTERACTION ANALYSIS; FBAR; FILM BULK ACOUSTIC RESONATORS; LABEL FREE; THICKNESS SHEAR MODES; TSM;

ACOUSTIC EQUIPMENT; ACOUSTIC RESONATORS; BIOSENSORS; CMOS INTEGRATED CIRCUITS; DNA; QUARTZ CRYSTAL MICROBALANCES;

ACOUSTIC SURFACE WAVE FILTERS;

BOVINE SERUM ALBUMIN; BUFFER; CALCITONIN; CYCLOOXYGENASE 2; DNA; METAL; OXIDE; PROCALCITONIN; PROTEIN PRECURSOR;

ACOUSTICS; ANIMAL; BOVINE; CHEMISTRY; DEVICES; GENETIC PROCEDURES; GENETICS; LIMIT OF DETECTION; POLYMERASE CHAIN REACTION; QUARTZ CRYSTAL MICROBALANCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SERUM; STAINING; SURFACE PLASMON RESONANCE;

ACOUSTICS; ANIMALS; BIOSENSING TECHNIQUES; BUFFERS; CALCITONIN; CATTLE; CYCLOOXYGENASE 2; DNA; LIMIT OF DETECTION; METALS; MICROSCOPY, ELECTRON, SCANNING; OXIDES; POLYMERASE CHAIN REACTION; PROTEIN PRECURSORS; QUARTZ CRYSTAL MICROBALANCE TECHNIQUES; SEMICONDUCTORS; SERUM; SERUM ALBUMIN, BOVINE; STAINING AND LABELING; SURFACE PLASMON RESONANCE;

EID: 77953527909     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100504180     Document Type: Article

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