An integrated gravimetric FBAR circuit for operation in liquids using a flip-chip extended 0.13μm CMOS technology

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 2007, Pages 392-394

  Augustyniak, M ^a,e   Weber, W ^b   Beer, G ^b   Mulatz, H ^a   Elbrecht, L ^b   Timme, H J ^b   Tiebout, M ^b   Simburger W ^b   Paulus, C ^c   Eversmann, B ^c   Schmitt Landsiedel, D ^a   Thewes, R ^d   Brederlow, R ^e  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

^c SIEMENS AG   (Germany)

^d QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

^e Texas Instruments Deutschland GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; AMPLIFIERS (ELECTRONIC); FLIP CHIP DEVICES; FREQUENCY SHIFT KEYING; JITTER; NATURAL FREQUENCIES;

FLIP CHIP BONDING; GRAVIMETRIC SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 34548855927     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2007.373459     Document Type: Conference Paper

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