Fully integrated FBAR sensor matrix for mass detection

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 1051-1054

  Tukkiniemi, K ^a   Rantala, A ^a   Nirschl, M ^b   Pitzer, D ^b   Huber, T ^b   Schreiter, M ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b SIEMENS AG   (Germany)

Author keywords

bioelectronics; CMOS; FBAR; full integrated; mass sensor matrix

Indexed keywords

FILM BULK ACOUSTIC RESONATORS; FULLY INTEGRATED; IN-VITRO; LABEL FREE; MASS DETECTION; MASS SENSOR; MATRIX SENSOR; READOUT CIRCUITRY; RESONANCE FREQUENCIES; SENSOR MATRIX; WAFER LEVEL;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; NUCLEIC ACIDS; RESONANCE;

SENSORS;

EID: 71549172785     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.262     Document Type: Conference Paper

References (3)

1. Link M., Schreiter M., Weber J., Primig R., Pitzer D., and Gabl R. Solidly mounted zno shear mode film bulk acoustic resonators for sensing applications in liquids. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control vol. 53 no. 2 (February 2006) 492-496
2. Schneider T., Doerner S., Hauptmann P.R., Richter D., and Fritze H. Fast impedance analyzer interface with direct-sampling-technique for highly damped resonant gas sensors. Sensors, 2005 IEEE; Oct. 30 2005-Nov. 3 2005 (2005) Page(s):4 pp.
3. M. Nirschl, A. Blüher, C. Erler, B. Katzschner, I. Vikholm-Lundin, S. Auer, J. Vörös, W. Pompe, M. Schreiter, M. Mertig, Film bulk acoustic resonators for DNA and protein detection and investigation of in vitro bacterial S-layer formation, Sensors and Actuators A: Physical, In Press