Oscillators based on monolithically integrated AlN TFBARs

IEEE Transactions on Microwave Theory and Techniques

Volumn 56, Issue 12, 2008, Pages 3209-3216

  Norling, Martin ^a   Enlund, Johannes ^b   Katardjiev, Ilia ^b   Gevorgian, Spartak ^a,c  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

^c Ericsson Microwave Systems AB   (Sweden)

Author keywords

Acoustic resonator; Hybrid integration; Multichip module (MCM); Oscillator; Thin film bulk acoustic resonator (TFBAR); Thin film device

Indexed keywords

ACOUSTIC EQUIPMENT; ACOUSTICS; CIVIL AVIATION; ELECTRIC CONVERTERS; MONOLITHIC INTEGRATED CIRCUITS; MULTICHIP MODULES; OSCILLATORS (ELECTRONIC); RESONATORS; SEMICONDUCTOR MATERIALS; SWITCHING SYSTEMS; THIN FILM DEVICES; VLSI CIRCUITS;

CARRIER SUBSTRATES; HYBRID INTEGRATION; MONOLITHICALLY INTEGRATED; OSCILLATOR; OSCILLATOR CIRCUITS; PASSIVE COMPONENTS; THIN-FILM BULK ACOUSTIC RESONATOR (TFBAR); THIN-FILM DEVICE;

ACOUSTIC RESONATORS;

EID: 57849131656     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2008.2007091     Document Type: Conference Paper

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