Comparative study of various release methods for polysilicon surface micromachining

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 442-447

  Kim, John Y ^a   Kim, Chang Jin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENZENE; CARBON DIOXIDE; EVAPORATION; METALLOGRAPHIC MICROSTRUCTURE; METHANOL; MICROMACHINING; SEMICONDUCTING SILICON; SUBLIMATION;

DICHLOROBENZENE; POLYSILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0030676704     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)