Analysis and optimization of two movable plates RF MEMS switch for simultaneous improvement in actuation voltage and switching time

Microelectronics Journal

Volumn 41, Issue 5, 2010, Pages 257-265

  Kundu, A ^a   Sethi, S ^a   Mondal, N C ^a   Gupta, B ^a   Lahiri, S K ^b   Saha, H ^a  

^a JADAVPUR UNIVERSITY   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Actuation voltage; Equivalent model; RF MEMS switch; Switching speed; Two movable plates

Indexed keywords

ACTUATION VOLTAGES; BOTTOM PLATE; CLOSED-FORM EXPRESSION; CONTINUITY EQUATIONS; EQUIVALENT MODEL; MEMBRANE PARAMETERS; MEMS SWITCHES; NUMERICAL RESULTS; PERFORMANCE CHARACTERISTICS; PLATE DESIGN; RF-MEMS SWITCHES; SIMULTANEOUS REDUCTION; SWITCHING SPEED; SWITCHING TIME; SWITCHING VOLTAGES;

ELECTRIC SWITCHES; NUMERICAL ANALYSIS; OPTIMIZATION;

SWITCHING;

EID: 77953140040     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2010.03.001     Document Type: Article

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