Miniature RF MEMS switched capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 745-748

  Mercier, Denis ^a   Van Caekenberghe, Koen ^a   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Capacitors; Reliability; RF MEMS; Switching speed

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC PROPERTIES; ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; RELIABILITY; WAVEGUIDES;

ACTUATION VOLTAGE; RAYTHEON SWITCHES; RF MEMS; SWITCHING SPEED;

CAPACITORS;

EID: 33749237545     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516719     Document Type: Conference Paper

References (4)

1. G. M. Rebeiz, RF MEMS Theory, Design, and Technology, New York: J. Wiley& Sons, 2003.
2. tm version 2003, http://www.coventore.com
3. J. Robert Reid, LaVern A. Starman, and Richard T. Webster, "RF Actuation of Capacitive MEMS Switches," 2003 IEEE MTT-S Int. Microwave Symp. Dig., vol. 3, pp. 1919-1922, June 2003.
4. J. Robert Reid, "Simulation and measurement of dielectric charging in electrostatically actuated capacitive microwave switches," Nanotech Int. Conf. Proc., vol. 1, pp. 250-253, 2002.