Deposition of zirconium carbonitride composite films using ion and electron beams emitted from plasma focus device

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 268, Issue 13, 2010, Pages 2228-2234

  Khan, I A ^a   Jabbar, S ^a   Hussain, T ^a   Hassan, M ^a   Ahmad, R ^a   Zakaullah, M ^b   Rawat, R S ^c  

^a GC UNIVERSITY   (Pakistan)

^b QUAID I AZAM UNIVERSITY   (Pakistan)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Focus shots; Microhardness; Microstructure; PFD; XRD; ZrCN

Indexed keywords

CARBIDE PHASIS; CARBONITRIDES; DIFFRACTION PEAKS; FILM-DEPOSITION PROCESS; FOCUS SHOTS; IMPOSED LOADS; NANOCRYSTALLINE MICROSTRUCTURES; NANOCRYSTALLINES; PLASMA FOCUS DEVICES; RAMAN ANALYSIS; SCANNING ELECTRON MICROSCOPE; XRD;

AGGLOMERATION; CARBIDES; CARBON NITRIDE; COMPRESSIVE STRESS; CRYSTALLITE SIZE; ELECTRON BEAMS; MICROHARDNESS; MICROSTRUCTURE; PLASMA DEPOSITION; PLASMA DEVICES; SCANNING ELECTRON MICROSCOPY; TENSILE STRESS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM; ZIRCONIUM COMPOUNDS;

COMPOSITE FILMS;

EID: 77953133313     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2010.03.030     Document Type: Article

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