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Materials Letters

Volumn 59, Issue 26, 2005, Pages 3230-3233

Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films

(4) Yao, S H a Su, Y L b Kao, W H c Cheng, K W b

a CHANG JUNG CHRISTIAN UNIVERSITY (Taiwan)

b NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

c CHIENKUO TECHNOLOGY UNIVERSITY (Taiwan)

Author keywords

Hardness; Wear; ZrCN thin films

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; THIN FILMS; ZIRCONIUM COMPOUNDS;

PERIODIC GROUPS; UNBALANCED MAGNETRON SPUTTER DEPOSITION; WEAR BEHAVIOR; ZRCN THIN FILMS;

WEAR OF MATERIALS;

EID: 24144502882 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/j.matlet.2005.04.064 Document Type: Article

Times cited : (37)

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