Self-leveling two-dimensional probe arrays for Dip Pen Nanolithography®

Scanning

Volumn 32, Issue 1, 2010, Pages 49-59

  Haaheim, Jason ^a   Val, Vadim ^a   Bussan, John ^a   Rozhok, Sergey ^a   Jang, Jae Won ^a   Fragala, Joe ^a   Nelson, Mike ^a  

^a NANOINK INC   (United States)

Author keywords

2D cantilever arrays; 2D tip arrays; AFM; Alkanethiols; Atomic force microscope; Dip Pen Nanolithography ; Direct deposition; DPN ; Gold; Leveling automation; Massively parallel nanopatterning; Microscale device planarity; Nanofabrication; Nanolithography; Nanoscale deposition; Nanoscale lithography; Scanning probe lithography; Scanning probe microscopy; SPL; SPM

Indexed keywords

2D CANTILEVER ARRAY; AFM; ALKANETHIOLS; ATOMIC FORCE MICROSCOPES; DIP-PEN NANOLITHOGRAPHY; DIRECT DEPOSITION; MICROSCALE DEVICE PLANARITY; MICROSCALE DEVICES; NANOFABRICATION; NANOPATTERNING; NANOSCALE DEPOSITION; NANOSCALE LITHOGRAPHY; PLANARITY; SCANNING PROBE LITHOGRAPHY;

ATOMIC FORCE MICROSCOPY; FIXTURES (TOOLING); GOLD COATINGS; GOLD DEPOSITS; NANOCANTILEVERS; NANOLITHOGRAPHY; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; PHOTORESISTS; PROBES; SCANNING; THROUGHPUT;

TWO DIMENSIONAL;

ALKANE; GOLD; THIOL DERIVATIVE;

ARTICLE; ATOMIC FORCE MICROSCOPY; AUTOMATION; DEVICE; DIP PEN NANOLITHOGRAPHY; MATERIALS; MICROFLUIDICS; NANOTECHNOLOGY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING PROBE MICROSCOPY;

EID: 77953010051     PISSN: 01610457     EISSN: 19328745     Source Type: Journal    
DOI: 10.1002/sca.20175     Document Type: Article

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