Nanograss and nanostructure formation on silicon using a modified deep reactive ion etching

Applied Physics Letters

Volumn 96, Issue 20, 2010, Pages

  Mehran, M ^a   Mohajerzadeh, S ^a   Sanaee, Z ^a   Abdi, Y ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE ACCELEROMETERS; DEEP REACTIVE ION ETCHING; ETCHING PROCESS; HIGH ASPECT RATIO; INTERDIGITAL; NANOGRASS; NANOSTRUCTURE FORMATION; SILICON NANOGRASS; SILICON SUBSTRATES; VERTICAL STRUCTURES; VERTICAL SURFACE;

ASPECT RATIO; NANOSTRUCTURES; PASSIVATION;

REACTIVE ION ETCHING;

EID: 77952999874     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3428360     Document Type: Article

References (19)

1. P. Engelhart, N. P. Harder, R. Grischke, A. Merkle, R. Meyer, and R. Brendel, Prog. Photovoltaics PPHOED 1062-7995 15, 237 (2007). 10.1002/pip.732
2. J. T. Zhu, Y. F. Shen, W. Li, X. Chen, G. Yin, D. Y. Chen, and L. Zhao, Appl. Surf. Sci. ASUSEE 0169-4332 252, 2752 (2006). 10.1016/j.apsusc.2005.04.048 (Pubitemid 43136686)
3. A. Starovoitov and S. Bayliss, J. Porous Mater. JPMAFX 1380-2224 7, 367 (2000). 10.1023/A:1009695223104
4. S. Juodkazis, Y. Nishi, H. Misawa, V. Mizeikis, O. Schecker, R. Waitz, P. Leiderer, and E. Scheer, Opt. Express OPEXFF 1094-4087 17, 15308 (2009). 10.1364/OE.17.015308
5. P. Fath, G. Wileke, E. Bucher, J. Szlufcic, R. M. Murti, K. De Clercq, J. Nijs, and R. Mertens, Proceedings of the 24th IEEE Photovoltaic Specialist Conference, 1994, Vol. 2, p. 1347.
6. C. W. Won, H. H. Nersisyan, C. Y. Shin, and J. H. Lee, Microporous Mesoporous Mater. MIMMFJ 1387-1811 126, 166 (2009). 10.1016/j.micromeso.2009.05. 036
7. C. A. Betty, Biosens. Bioelectron. BBIOE4 0956-5663 25, 338 (2009). 10.1016/j.bios.2009.07.009
8. K. Tsujino, M. Matsumura, and Y. Nishimoto, Sol. Energy Mater. Sol. Cells SEMCEQ 0927-0248 90, 100 (2006). 10.1016/j.solmat.2005.02.019 (Pubitemid 41566157)
9. A. Givant, J. Shappir, and A. Sa'ar, Phys. Status Solidi A PSSABA 0031-8965 182, 419 (2000). 10.1002/1521-396X(200011)182:1<419:AID- PSSA419>3.0.CO;2-K
10. S. Yae, T. Kobayashi, T. Kawagishi, N. Fukumuro, and H. Matsuda, Solar Energy 80, 701 (2006). 10.1016/j.solener.2005.10.011 (Pubitemid 43782487)
11. S. Lee and E. Lee, J. Nanosci. Nanotechnol. JNNOAR 1533-4880 7, 3713 (2007). 10.1166/jnn.2007.019
12. B. González-Diaz, R. Guerrero-Lemus, N. Marrero, C. Hernández-Rodriáguez, F. A. Ben-Hander, and J. M. Martiánez-Duart, J. Phys. D JPAPBE 0022-3727 39, 631 (2006). 10.1088/0022-3727/39/4/006 (Pubitemid 43207916)
13. J. S. Yoo, I. O. Parm, U. Gangopadhyay, K. Kim, S. K. Dhungel, D. Mangalaraj, and J. Yi, Sol. Energy Mater. Sol. Cells SEMCEQ 0927-0248 90, 3085 (2006). 10.1016/j.solmat.2006.06.015 (Pubitemid 44332089)
14. J. Yoo, K. Kim, M. Thamilselvan, N. Lakshminarayn, Y. K. Kim, J. Lee, K. J. Yoo, and J. Yi, J. Phys. D: Appl. Phys 41, 125205 (2008). 10.1088/0022-3727/41/12/125205 0022-3727
15. R. Costa, K. Mogensen, and J. Kutter, The Royal Society of Chemistry 5, 1310 (2005).
16. H. V. Jansen, M. J. De Boer, S. Unnikrishnan, M. C. Louwerse, and M. C. Elwenspoek, J. Micromechanics and Microengineering 19, 033001 (2009). 10.1088/0960-1317/19/3/033001 0002-7820
17. R. K. Sharma, A. C. Rastogi, and S. B. Desu, Physica B PHYBE3 0921-4526 388, 344 (2007). 10.1016/j.physb.2006.06.146 (Pubitemid 44793092)
18. F. Francisco, M. Ivan, G. Germ̀, and B. Juan, J. Phys. Chem. JPCHAX 0022-3654 107, 758 (2003).
19. A. Sammak, S. Azimi, N. Izadi, B. K. Hosseinieh, and S. Mohajerzadeh, IEEE J. Microelectromech. Sys. 16, 912 (2007). 10.1109/JMEMS.2007.901123 (Pubitemid 47278834)