메뉴 건너뛰기




Volumn 17, Issue 17, 2009, Pages 15308-15317

Optical transmission and laser structuring of silicon membranes

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; AMORPHOUS SILICON; ELECTRIC BREAKDOWN; MEMBRANES; TIME DOMAIN ANALYSIS;

EID: 69049088820     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.015308     Document Type: Article
Times cited : (22)

References (27)
  • 3
    • 33847132253 scopus 로고    scopus 로고
    • Charge- and size-based separation of macromolecules using ultrathin silicon membranes
    • C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
    • (2007) Nature , vol.445 , pp. 749-753
    • Striemer, C.C.1    Gaborski, T.R.2    McGrath, J.L.3    Fauchet, P.M.4
  • 5
    • 65149089329 scopus 로고    scopus 로고
    • Flexible design of ultrahigh-Q microcavities in diamond-based photonic crystal, slabs
    • S. Tomljenovic-Hanic, A. D. Greentree, C. M. de Sterke, and S. Prawer, "Flexible design of ultrahigh-Q microcavities in diamond-based photonic crystal, slabs," Opt. Express 17, 6465-6475 (2009).
    • (2009) Opt. Express , vol.17 , pp. 6465-6475
    • Tomljenovic-Hanic, S.1    Greentree, A.D.2    de Sterke, C.M.3    Prawer, S.4
  • 6
    • 34548145769 scopus 로고    scopus 로고
    • Influence of laser light on electronic transport through atomic-size contacts
    • Phys. Rev. Lett, 086801/1-4
    • D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
    • (2007) , vol.99
    • Guhr, D.C.1    Rettinger, D.2    Boneberg, J.3    Erbe, A.4    Leiderer, P.5    Scheer, E.6
  • 7
    • 40449086353 scopus 로고    scopus 로고
    • Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane
    • J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
    • (2008) Nature , vol.452 , pp. 72-75
    • Thompson, J.D.1    Zwickl, B.M.2    Jayich, A.M.3    Marquardt, F.4    Girvin, S.M.5    Harris, J.G.E.6
  • 8
    • 45849096007 scopus 로고    scopus 로고
    • N. Kang, A. Erbe, and E. Scheer, Electrical characterization of DNA in mechanically controlled breakjunctions, New J. Phys. 10, 023030/1-9 (2008).
    • N. Kang, A. Erbe, and E. Scheer, "Electrical characterization of DNA in mechanically controlled breakjunctions," New J. Phys. 10, 023030/1-9 (2008).
  • 9
    • 54749126281 scopus 로고    scopus 로고
    • Nanofabricated adjustable multicontact devices on membranes
    • Rev. Sci. Instrum, 093901/1 -5
    • R. Waitz, O. Schecker, and E. Scheer, "Nanofabricated adjustable multicontact devices on membranes," Rev. Sci. Instrum. 79, 093901/1 -5 (2008).
    • (2008) , vol.79
    • Waitz, R.1    Schecker, O.2    Scheer, E.3
  • 12
    • 69049086132 scopus 로고    scopus 로고
    • Nano-contacts for ElectroMagnetic NanoSystems (NEMS),
    • Ph.D. thesis, Institute of Microelectronics, Electromagnetics, and Photonics, Grenoble, France and University of Konstanz, Konstanz, Germany
    • O. Schecker, "Nano-contacts for ElectroMagnetic NanoSystems (NEMS)," Ph.D. thesis, Institute of Microelectronics, Electromagnetics, and Photonics, Grenoble, France and University of Konstanz, Konstanz, Germany (2008).
    • (2008)
    • Schecker, O.1
  • 14
    • 1642621158 scopus 로고
    • General Relationship for the Thermal Oxidation of Silicon
    • online calculator at
    • B. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys. 36, 3770 3778 (1965); online calculator at http://ee.byu.edu/cleanroom/OxideThickCalc.phtml.
    • (1965) J. Appl. Phys , vol.36 , pp. 3770-3778
    • Deal, B.1    Grove, A.S.2
  • 15
    • 0242593743 scopus 로고    scopus 로고
    • Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching
    • S. A. Vitale and B. A. Smith, "Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching," J. Vac. Sci. Technol. B 21, 2205-2211 (2003).
    • (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2205-2211
    • Vitale, S.A.1    Smith, B.A.2
  • 16
    • 80054918470 scopus 로고    scopus 로고
    • Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography
    • Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophotonics 1, 594 (2008).
    • (2008) J. Nanophotonics , vol.1 , pp. 594
    • Yokota, Y.1    Ueno, K.2    Mizeikis, V.3    Juodkazis, S.4    Sasaki, K.5    Misawa, H.6
  • 17
    • 44449107649 scopus 로고    scopus 로고
    • K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source, J. Am. Chem. Soc. 130, 69286929 (2008).
    • K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 69286929 (2008).
  • 18
    • 42749107157 scopus 로고    scopus 로고
    • Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments
    • Phys. Rev. E, 035401R/1-3
    • H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
    • (2004) , vol.70
    • Morikami, H.1    Yoneda, H.2    Ueda, K.-I.3    More, R.M.4
  • 21
    • 6044229065 scopus 로고
    • Semiconductor surface damage produced by ruby lasers
    • M. J. Birnbaum, "Semiconductor surface damage produced by ruby lasers," J. Appl. Phys. 36, 3688 - 3689 (1965).
    • (1965) J. Appl. Phys , vol.36 , pp. 3688-3689
    • Birnbaum, M.J.1
  • 24
    • 62549096305 scopus 로고    scopus 로고
    • Suppression of ripples on Ni surface via a polarization grating
    • H. Iwase, S. Kokubo, S. Juodkazis, and H. Misawa, "Suppression of ripples on Ni surface via a polarization grating," Opt. Express 17, 4388-4396 (2009).
    • (2009) Opt. Express , vol.17 , pp. 4388-4396
    • Iwase, H.1    Kokubo, S.2    Juodkazis, S.3    Misawa, H.4
  • 25
    • 0042658349 scopus 로고    scopus 로고
    • Three- dimensional microchannels in polymers: One step fabrication
    • K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three- dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
    • (2003) Appl. Phys. A , vol.77 , pp. 371-373
    • Yamasaki, K.1    Juodkazis, S.2    Matsuo, S.3    Misawa, H.4
  • 27
    • 67449096762 scopus 로고    scopus 로고
    • F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntztager, Confined longitudinal acoustic phonon modes in free-standing Si. membranes coherently excited by femtosecond laser pulses, Phys. Rev. B 79, 201307R/1 - 4 (2009).
    • F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntztager, "Confined longitudinal acoustic phonon modes in free-standing Si. membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.