3D Simulation of nano-imprint lithography

Nanoscale Research Letters

Volumn 5, Issue 2, 2010, Pages 274-278

  Marín, Jose Manuel Román ^a   Rasmussen, Henrik Koblitz ^a   Hassager, Ole ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Finite element; Lagrangian; MSF; Nano imprint; NIL; Viscoelastic

Indexed keywords

3D SIMULATIONS; CONTACT LINES; DYNAMIC MOVEMENTS; FINITE ELEMENT; FLOW PHYSICS; FREE SURFACES; GALERKIN FINITE ELEMENT METHODS; LAGRANGIAN; LAGRANGIAN TECHNIQUES; MOLD FILLING; MOLECULAR STRESS FUNCTIONS; NANO-IMPRINT; PARALLEL COMPUTER ARCHITECTURE; PARTICLE MOVEMENT; PROOF OF CONCEPT; STRUCTURED LIQUIDS; THREE-DIMENSIONAL (3D); TIME DEPENDENT SIMULATION;

COMPUTER ARCHITECTURE; CRYSTALLOGRAPHY; FINITE ELEMENT METHOD; LAGRANGE MULTIPLIERS; LIQUIDS; MOLDS; POLYMER MELTS; THREE DIMENSIONAL; THREE DIMENSIONAL COMPUTER GRAPHICS;

NANOIMPRINT LITHOGRAPHY;

EID: 77952887908     PISSN: 19317573     EISSN: 1556276X     Source Type: Journal    
DOI: 10.1007/s11671-009-9475-7     Document Type: Article

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