메뉴 건너뛰기




Volumn 6, Issue 2, 2009, Pages 599-602

Surface diffusion during metalorganic vapor phase epitaxy of AlN

Author keywords

[No Author keywords available]

Indexed keywords

AL-POLARITY; ALN; CHEMICAL ETCHING; DIFFUSION LENGTH; ETCH PIT DENSITY; GROWTH CONDITIONS; KOH SOLUTION; METAL-ORGANIC VAPOR PHASE EPITAXY; MIGRATION ENHANCED EPITAXY; SAPPHIRE SUBSTRATES;

EID: 77952577557     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200880415     Document Type: Conference Paper
Times cited : (25)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.