Synthesis of organosilicon film on polycarbonate by means of low-temperature atmospheric-pressure plasma jet

IEEE Transactions on Plasma Science

Volumn 38, Issue 5, 2010, Pages 1101-1105

  Huang, Chun ^a   Wu, Shin Yi ^a   Chang, Ya Chi ^a  

^a YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Atmospheric pressure plasma jet (APPJ); Plasma applications; Plasma devices; Plasma polymerization; Surface characteristics

Indexed keywords

ATMOSPHERIC PRESSURE PLASMAS; ATMOSPHERIC-PRESSURE PLASMA JET (APPJ); CARRIER GAS; CHEMICAL COMPOSITIONS; FOURIER TRANSFORM INFRARED SPECTROMETER; HEXAMETHYLDISILAZANE; LOW TEMPERATURES; OPTICAL TRANSPARENCY; ORGANOSILICON FILMS; POLYMERIZED FILMS; RADIO FREQUENCY PLASMA; ROOM TEMPERATURE; STATIC CONTACT ANGLE; SURFACE CHARACTERISTICS; ULTRA-THIN; UV-VIS SPECTRA; UV-VIS SPECTROMETER;

ANGLE MEASUREMENT; ARGON; ATMOSPHERIC CHEMISTRY; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ACCELERATORS; PLASMA APPLICATIONS; PLASMA JETS; PLASMAS; POLYMERS; SPECTROMETERS; SPECTROMETRY; SURFACE MORPHOLOGY; SURFACE PROPERTIES; SYNTHESIS (CHEMICAL); ULTRATHIN FILMS;

PLASMA POLYMERIZATION;

EID: 77952241671     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2010.2044894     Document Type: Article

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