Protection coatings for polycarbonates based on PECVD from organosilicon feeds

Vacuum

Volumn 50, Issue 1-2, 1998, Pages 19-21

  Zajickova L ^a   Bursikova V ^a   Janca J ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; MECHANICAL VARIABLES MEASUREMENT; OPTICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; SEMICONDUCTING SILICON; THICKNESS MEASUREMENT; VICKERS HARDNESS TESTING;

HEXAMETHYDISILOXAN; ORGANOSILICON FEEDS; TETRAETHOXYSILOXAN;

PROTECTIVE COATINGS;

EID: 0032058331     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00006-2     Document Type: Article

References (10)

1. U.S. patent 005 554 418 A, 1996.
2. U.S. patent 005 569 497 A, 1996.
3. Navrátil, V. and Stejskalová, V., Phys. Stat. Sol. (a), 1996, 157, 339.
4. Jönsson, B. and Hogmark, S., Thin Solid Films, 1984, 114, 257.
5. Anstis, G. R., Chantikul, P., Lawn, B. R., and Marshall, D. B., J. Am. Ceram. Soc., 1981, 64, 533.
6. Matthewson, M. J., Appl. Phys. Lett., 1986, 49, 1426.
7. Zajičková, L., Ohlidal, I. and Janča, J., Thin Solid Films, 1996, 280, 26.
8. Veprek-Heijman, M. G. J. and Boutard, D., J. Electrochemical Soc., 1991, 138, 2042.
9. Malitson, I. H., J. Optical Society of America, 1965, 55, 1205.
10. Zajíčková, L. and Janča, J., Proceedings of ESCAMPIG, Poprad, 1996, p. 315.