Plasmapolymerized silicon organic thin films from HMDSN for capacitive humidity sensors

Sensors and Actuators, B: Chemical

Volumn 88, Issue 3, 2003, Pages 300-311

  Kraus, F ^a   Cruz, S ^a   Muller J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Hexamethyldisilazane; Humidity sensor; Plasmapolymerization

Indexed keywords

ATMOSPHERIC HUMIDITY; CAPACITANCE; CONTACT ANGLE; ELECTRODES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA POLYMERIZATION; SCANNING ELECTRON MICROSCOPY; SILICON; THIN FILMS;

HUMIDITY SENSORS;

CHEMICAL SENSORS;

EID: 0037429184     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00373-8     Document Type: Article

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