Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

Microsystem Technologies

Volumn 16, Issue 5, 2010, Pages 837-845

  Manzaneque, Tomás ^a   Hernando, J ^a   Rodriguez Aragon L ^a   Ababneh, A ^b   Seidel, H ^b   Schmid, U ^c   Sanchez Rojas J L ^a  

^a UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

^b SAARLAND UNIVERSITY   (Germany)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALUMINIUM NITRIDE; DIFFERENT MODES; ELECTRICAL IMPEDANCE MEASUREMENT; ELECTRICAL MEASUREMENT; EXPERIMENTAL DATA; FINITE ELEMENT MODEL ANALYSIS; FITTING METHOD; FREQUENCY SPECTRA; LASER DOPPLER VIBROMETERS; LIQUID MEDIA; MICRO RESONATORS; MODAL SHAPE; OPTICAL MEASUREMENT; Q-FACTORS; QUALITY FACTORS; RESONANCE FREQUENCIES; TRANSIENT RESPONSE; VIBRATION MODES;

ALUMINUM COMPOUNDS; ELECTRIC IMPEDANCE MEASUREMENT; FINITE ELEMENT METHOD; LIQUIDS; NITRIDES; OPTICAL DATA PROCESSING; Q FACTOR MEASUREMENT; RESONANCE; RESONATORS; SPECTROSCOPY;

QUALITY CONTROL;

EID: 77951967076     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-1003-2     Document Type: Conference Paper

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