Micromachined piezoelectric resonator at MHz application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6172, Issue , 2006, Pages

  Le, T Thao ^a,b   Valbin, Laurie ^b   Verjus, Fabrice ^a   Bourouina, Tarik ^b  

^a NXP SEMICONDUCTORS   (Netherlands)

^b ESIEE PARIS   (France)

Author keywords

Piezoelectricity; Quality factor; TFBAR; Thin film

Indexed keywords

ACOUSTIC RESONATORS; ALUMINUM NITRIDE; MICROMACHINING; SPUTTERING; SUBSTRATES; THIN FILMS;

QUALITY FACTOR; TFBAR; THIN FILM;

PIEZOELECTRIC MATERIALS;

EID: 33745934697     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.654762     Document Type: Conference Paper

References (8)

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