Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications

Applied Physics Letters

Volumn 92, Issue 18, 2008, Pages

  Gonzalez Castilla S ^a   Olivares, J ^a   Clement, M ^a   Iborra, E ^a   Sangrador, J ^a   Malo, J ^a   Izpura, J I ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE; METALLIC FILMS; RESONANCE; RESONATORS;

MICROBRIDGES; VIBRATIONAL MODES;

ALUMINUM COMPOUNDS;

EID: 43349088979     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2924284     Document Type: Article

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