Structural and mechanical characterization of diamond like carbon films grown by microwave plasma CVD

Surface and Coatings Technology

Volumn 204, Issue 16-17, 2010, Pages 2817-2821

  Sahoo, Sambita ^a   Pradhan, Swati S ^a   Bhavanasi, Venkateswarlu ^a   Pradhan, S K ^a  

^a CSIR INSTITUTE OF MINERALS AND MATERIALS TECHNOLOGY   (India)

Author keywords

Diamond like carbon (DLC); Microwave plasma CVD; Nanoindentation; Polymeric DLC

Indexed keywords

ACTIVATED PROCESS; ANTI-CORROSION; ATOMIC FORCE MICROSCOPES; BIOCOMPATIBLE COATINGS; DIAMOND LIKE CARBON; DLC FILM; FTIR; HIGH PRESSURE; MICROWAVE PLASMA CVD; NANO-CRYSTALLINE STRUCTURES; PLASMA CVD REACTOR; PLASMA-CVD; RADIO FREQUENCY PLASMA; RAMAN SPECTRA; RMS ROUGHNESS; SCRATCH-RESISTANT COATINGS; SMOOTH SURFACE; STEEL SUBSTRATE; STRUCTURAL AND MECHANICAL CHARACTERIZATIONS; TEM; UV-VISIBLE SPECTRA; VISIBLE TRANSMITTANCE; YOUNG'S MODULUS;

CARBON FILMS; CHEMICAL VAPOR DEPOSITION; COATINGS; CYCLOTRONS; DIAMONDS; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MECHANICAL PROPERTIES; MICROWAVES; NANOINDENTATION; PLASMAS; POLYMERIC FILMS; POLYMERS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 77951295400     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.02.058     Document Type: Article

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