Nanoindentation and AFM studies of PECVD DLC and reactively sputtered Ti containing carbon films

Bulletin of Materials Science

Volumn 26, Issue 6, 2003, Pages 585-591

  Pauschitz, A ^a   Schalko, J ^c   Koch, T ^c   Eisenmenger Sittner, C ^c   Kvasnica, S ^a,c   Roy, Manish ^b  

^a AC2T RESEARCH GMBH   (Austria)

^b DEFENCE METALLURGICAL RESEARCH LABORATORY   (India)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Carbon films; Nanoindentation; Topography

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; FILM PREPARATION; MICROSTRUCTURE; NANOTECHNOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SURFACE TOPOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY;

DIAMOND LIKE CARBON; NANOINDENTATION; UNBALANCED MAGNETRON SPUTTER DEPOSITION;

DIAMOND FILMS;

EID: 0142039920     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02704320     Document Type: Article

References (18)

1. Bhusan B 1999 Handbook of micro/nanotribology (Boca Raton, FL: CRC Press) 2nd ed.
2. Butter R, Allen M, Chandra L, Lettington A H and Rushton N 1995 Diamond & Relat. Mater. 4 857
3. Dean K A and Chalamala B R 1999 Appl. Phys. Lett. 76 375
4. Demigan H and Klages C P 1991 Surf. Coat. Technol. 49 543
5. Donnet C 1996 Surf. Coat. Technol. 80 139
6. Grischke M, Hicke A, Morgenweck F and Demigan H 1998 Diamond & Relat. Mater. 7 454
7. Haubner R and Lux B 1993 Diamond Relat. Mater. 2 1277
8. Holmberg K and Mathews A 1994 Coat. tribology (New York: Elsevier)
9. Kohzaki M, Higuchi K, Noda S and Uccida K 1992 J. Mater. Res. 7 1769
10. Kvasnica S, Fasching R and Kohl F 2001a Proc. of int. symp. on plasma chemistry 15, Orleans, France
11. Kvasnica S, Fallman W, Biederman H, Boldyreva H and Slavínská D 2001b Deposition and characterization of Ti/C: H films, in Proc. int. symp. on plasma chemistry 15, Orleans, France
12. Miyoshi K, Wu R L C and Garscaden A 1992 Surf. Coat. Technol. 54/55 428
13. Monaghan D P, Teer D G, Logan P A, Efeoglu I and Arnell R D 1993 Surf. Coat. Technol. 60 525
14. Oliver W C and Pharr G M 1992 J. Mater. Res. 7 1564
15. Robertson J 2002 Mater. Sci. & Engg. R37 129
16. Schalko J 2001 Deposition and characterization of PECVD carbon and carbon alloy films in various modification, Ph D thesis, Vienna University of Technology, Vienna
17. Wu R L C, Miyoshi K, Vuppuladhadium R and Jackson H E 1992 Surf. Coat. Technol. 54/55 576
18. Zehnder T and Patscheider J 2000 Surf. Coat. Technol. 133-134 138