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Volumn 31, Issue 5, 2008, Pages 813-818
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Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD
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Author keywords
Chemical vapour deposition; Diamond like carbon; Mechanical properties; Raman spectroscopy
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Indexed keywords
ARGON;
CARBON;
CARBON FILMS;
CHEMICAL PROPERTIES;
CHEMICAL VAPOR DEPOSITION;
CYCLOTRONS;
DIAMOND FILMS;
DIAMONDS;
ELASTIC MODULI;
ELECTRIC LOAD MANAGEMENT;
ELECTRON CYCLOTRON RESONANCE;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HARDNESS;
INERT GASES;
MECHANICAL PROPERTIES;
METHANE;
MICROWAVES;
OPTICAL PROPERTIES;
PLASMA DEPOSITION;
PLASMAS;
RAMAN SCATTERING;
RAMAN SPECTROSCOPY;
REFRACTIVE INDEX;
SILICON;
SPECTROSCOPIC ELLIPSOMETRY;
SPECTRUM ANALYSIS;
SUBSTRATES;
CHEMICAL VAPOUR DEPOSITION;
CHEMICAL VAPOUR DEPOSITIONS;
DEPOSITED COATINGS;
DEPTH SENSING INDENTATION TECHNIQUES;
DIAMOND LIKE CARBON;
DIAMOND LIKE CARBONS;
DLC FILMS;
ECR PLASMAS;
HIGH ELASTIC MODULUS;
HIGH HARDNESSES;
HIGH REFRACTIVE INDICES;
MICROWAVE ELECTRON CYCLOTRON RESONANCES;
OPTICAL-;
PROCESS PARAMETERS;
PROCESS USING;
RF POWERS;
SI(111) SUBSTRATES;
SUBSTRATE BIASES;
DIAMOND LIKE CARBON FILMS;
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EID: 55649088551
PISSN: 02504707
EISSN: None
Source Type: Journal
DOI: 10.1007/s12034-008-0129-7 Document Type: Article |
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Times cited : (25)
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References (15)
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