Effect of substrate holder boundaries on reproducibility of bias-enhanced diamond nucleation

Thin Solid Films

Volumn 406, Issue 1-2, 2002, Pages 70-74

  Sharda, T ^a   Soga, T ^a   Jimbo, T ^a   Umeno, M ^b  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b CHUBU UNIVERSITY   (Japan)

Author keywords

CVD; Diamond; Electron emission; Nucleation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; NUCLEATION; POSITIVE IONS; SILICON; SUBSTRATES;

BIAS-ENHANCED DIAMOND NUCLEATION;

DIAMONDS;

EID: 0037051235     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01774-6     Document Type: Article

References (25)