Characterization of diamond-like carbon coatings prepared by pulsed bias cathodic vacuum arc deposition

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 243-247

  Wu, Jin Bao ^a   Chang, Jia Jen ^a   Li, Mei Yi ^b   Leu, Ming Sheng ^a   Li, Ai Kang ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Cathodic vacuum arc; Diamond like carbon coatings; Pulsed bias

Indexed keywords

CARBON; CATHODES; DEPOSITION; HYDROGEN; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

CATHODIC VACUUM ARC; DIAMOND-LIKE CARBON COATINGS; PULSED BIAS;

COATINGS;

EID: 36048951383     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.134     Document Type: Article

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