Influence of gas velocity and humidity on diethyl phthalate adsorption and desorption on silicon surface

ECS Transactions

Volumn 2, Issue 2, 2006, Pages 523-536

  Habuka, Hitoshi ^a   Tawada, Masaki ^a   Suzuki, Kisho ^a   Takeuchi, Takashi ^a   Aihara, Masahiko ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CONTAMINATION; CRYSTAL STRUCTURE; GAS ABSORPTION; NITROGEN; QUARTZ APPLICATIONS; SURFACE TREATMENT;

AMBIENT NITROGEN; GAS VELOCITY; KEY PARAMETERS; QUARTZ CRYSTAL MICROBALANCE;

SILICON;

EID: 33745467839     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2195687     Document Type: Conference Paper

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