Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe) 4

Materials Research Society Symposium Proceedings

Volumn 1155, Issue , 2009, Pages 131-136

  Popovici, Mihaela ^a   Van Elshocht, S ^a   Menou, N ^a   Swerts, J ^b   Pierreux, D ^b   Delabie, A ^a   Opsomer, K ^a   Brijs, B ^a   Faelens, G ^a   Franquet, A ^a   Conard, T ^a   Maes, J W ^b   Wouters, D J ^a   Kittl, J A ^a  

^a IMEC   (Belgium)

^b ASM BELGIUM   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CRYSTALLINE MATERIALS; PEROVSKITE; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRONTIUM TITANATES;

CRYSTALLINE STATE; HIGHER INDEX; LAYER CHARACTERIZATION; PEROVSKITE STRUCTURES; TI PRECURSOR;

THIN FILMS;

EID: 77950974110     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-1155-c08-03     Document Type: Conference Paper

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