Variational interconnect analysis for double patterning lithography

2008 Proceedings - 25th International VLSI Multilevel Interconnection Conference, VMIC 2008

Volumn , Issue , 2008, Pages 267-270

  Topaloglu, Rasit Onur ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE PATTERNING; INTERCONNECT ANALYSIS; INTERCONNECT COUPLING CAPACITANCE; INTERCONNECT LAYERS; INTERCONNECT TECHNOLOGY; TCAD SIMULATION;

INTERCONNECTION NETWORKS; VARIATIONAL TECHNIQUES;

LITHOGRAPHY;

EID: 77950851852     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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