30 nm resolution x-ray imaging at 8 keV using third order diffraction of a zone plate lens objective in a transmission microscope

Applied Physics Letters

Volumn 89, Issue 22, 2006, Pages

  Yin, Gung Chian ^a,b   Song, Yen Fang ^a   Tang, Mau Tsu ^a   Chen, Fu Rong ^a   Liang, Keng S ^a   Duewer, Frederick W ^c   Feser, Michael ^c   Yun, Wenbing ^c   Shieh, Han Ping D ^b  

^a NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^c XRADIA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; LIGHTING; OPTICAL RESOLVING POWER; X RAY ANALYSIS;

CAPILLARY TYPE CONDENSER; NUMERICAL APERTURE; X-RAY ENERGY; X-RAY TRANSMISSION MICROSCOPE;

IMAGING TECHNIQUES;

EID: 33751571479     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2397483     Document Type: Article

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