Diamond deposition at low temperature by using CH4/H2 gas mixture

Diamond and Related Materials

Volumn 11, Issue 9, 2002, Pages 1697-1702

  Dong, Lifang ^a   Ma, Boqin ^a   Dong, Guoyi ^a  

^a HEBEI UNIVERSITY   (China)

Author keywords

Electron assisted chemical vapor deposition; Low temperature; Monte Carlo simulation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DEPOSITION; GRAIN SIZE AND SHAPE; HYDROGEN; LOW TEMPERATURE EFFECTS; MONTE CARLO METHODS;

SUBSTRATE TEMPERATURE;

DIAMONDS;

DIAMOND COATING;

EID: 0036720742     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00140-1     Document Type: Article

References (29)