Compositional mapping of the argon-methane-hydrogen system for polycrystalline to nanocrystalline diamond film growth in a hot-filament chemical vapor deposition system

Applied Physics Letters

Volumn 77, Issue 17, 2000, Pages 2692-2694

  Lin, T ^a   Yu, G Y ^a   Wee, A T S ^a   Shen, Z X ^a   Loh, Kian Ping ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000217276     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1320039     Document Type: Article

References (7)

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