Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1592-1596

  Sharda, T ^a   Soga, T ^a   Jimbo, T ^a   Umeno, M ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Bias; Chemical vapor deposition; Diamond films; Grain size

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES; X RAY DIFFRACTION;

SUBPLANTATION MECHANISM;

DIAMOND FILMS;

DIAMOND;

EID: 0035448828     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00415-0     Document Type: Article

References (22)