Factors affecting surface roughness of Al2O3 films deposited on Cu substrates by an aerosol deposition method

Journal of Ceramic Processing Research

Volumn 11, Issue 1, 2010, Pages 100-106

  Lee, Dong Won ^a   Nam, Song Min ^a  

^a Kwangwoon University   (South Korea)

Author keywords

Aerosol deposition method; Al2O3; Crater; Cu substrate; Film; Room temperature; Surface roughness

Indexed keywords

EID: 77950635934     PISSN: 12299162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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