Study on the surface roughness of substrate with multi-fractal spectrum

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1806-1809

  Gan, Shuyi ^a,b   Zhou, Qing ^b   Xu, Xiangdong ^a   Hong, Yilin ^a   Liu, Yin ^a   Fu, Shaojun ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

AFM image; Fractal; Multi fractal spectrum; RMS; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; FRACTALS; RANDOM PROCESSES; SAMPLING; SPECTRUM ANALYSIS; SURFACE ROUGHNESS;

AFM IMAGES; MULTI FRACTAL SPECTRUM; RANDOM SAMPLING;

SUBSTRATES;

EID: 34247640699     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.273     Document Type: Article

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