A latchable valve for high-pressure microfluidics

Journal of Microelectromechanical Systems

Volumn 19, Issue 2, 2010, Pages 396-401

  Ogden, Sam ^a   Bodén, Roger ^b   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b MultusMEMS   (Sweden)

Author keywords

Fluid flow control; Microactuators; Steel; Valves

Indexed keywords

APPLIED PRESSURE; AVERAGE POWER; CLAMPING PRESSURE; FLUID FLOW CONTROL; INTEGRATED ACTUATOR; LATCHABLE VALVE; MAXIMUM PRESSURE; MICRO FLUIDIC APPLICATIONS; STEEL VALVES; VALVE HEADS; VALVE SEATS;

FLOW CONTROL; FLOW OF FLUIDS; MICROACTUATORS; MICROFLUIDICS; PARAFFIN WAXES; PARAFFINS;

VALVES (MECHANICAL);

EID: 77950596203     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2041749     Document Type: Article

References (12)

1. X. Wang, C. Cheng, S. Wang, and S. Liu, "Electroosmotic pumps and their applications in microfluidic systems," Microfluid. Nanofluid. 6, no.2, pp. 145-162, Feb. 2009.
2. B. Yang and Q. Lin, "A latchable phase-change microvalve with integrated heaters," J. Microelectromech. Syst. 18, no.4, pp. 860-867, Aug. 2009.
3. C. Goll, W. Bacher, B. Büstgens, D. Maas, W. Menz, and W. K. Schomburg, "Microvalves with bistable buckled polymer diaphragms," J. Micromech. Microeng. 6, no.1, pp. 77-79, Mar. 1996.
4. J. Barth, T. Grund, B. Krevet, and M. Kohl, "A magnetic-force enhanced bistable shape memory microactuator," in Proc. Actuator, Bremen, Germany, Jun. 9-11, 2008, pp. 386-389.
5. K. A. Shaikh, S. Li, and C. Liu, "Development of a latchable microvalve employing a low-melting-temperature metal alloy," J. Microelectromech. Syst. 17, no.5, pp. 1195-1203, Oct. 2008.
6. M. Lehto and R. Bodén, "A multi-stable miniature paraffin actuator," in Proc. Actuator, Bremen, Germany, Jun. 9-11, 2008, pp. 864-867.
7. L. Klintberg, M. Karlsson, L. Stenmark, J.-Å. Schweitz, and G. Thornell, "A large stroke, high force paraffin phase transition actuator," Sens. Actuators A, Phys. 96, no. 2/3, pp. 189-195, Feb. 2002.
8. E. T. Carlen and C. H. Mastrangelo, "Electrothermally activated paraffin microactuators," J. Microelectromech. Syst. 11, no.3, pp. 165-174, Jun. 2002.
9. J. S. Lee and S. Lucyszyn, "Design and pressure analysis for bulk micro-machined electrothermal hydraulic microactuators using a PCM," Sens. Actuators A, Phys. 133, no.2, pp. 294-300, Feb. 2007.
10. R. Bodén, M. Lehto, J. Margell, K. Hjort, and J.-Å. Schweitz, "On-chip liquid storage and dispensing for lab-on-a-chip applications," J. Mi-cromech. Microeng. 18, no.7, p. 075 036, Jul. 2008.
11. R. Bodén, K. Hjort, J.-Å. Schweitz, and U. Simu, "A metallic micropump for high-pressure microfluidics," J. Micromech. Microeng. 18, no.11, p. 115 009, Nov. 2008.
12. S. Ogden, R. Bodén, and K. Hjort, "A latchable high-pressure microfluidic valve," in Proc. TRANSDUCERS, Denver, CO, Jun. 22-25, 2009, pp. 29-32.