Electrothermally activated paraffin microactuators

Journal of Microelectromechanical Systems

Volumn 11, Issue 3, 2002, Pages 165-174

  Carlen, Edwin T ^b   Mastrangelo, Carlos H ^a,c  

^a IEEE   (United States)

^b IntelliSense Corporation   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Microactuators; Paraffin

Indexed keywords

MELTING POINTS;

DIAPHRAGMS; ELECTRIC POWER SYSTEMS; GLASS; MELTING; MICROELECTRONIC PROCESSING; MICROMACHINING; PARAFFINS; SEMICONDUCTING SILICON; SUBSTRATES;

MICROACTUATORS;

EID: 0036601109     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.1007394     Document Type: Article

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