A metallic micropump for high-pressure microfluidics

Journal of Micromechanics and Microengineering

Volumn 18, Issue 11, 2008, Pages

  Bodén, Roger ^a   Hjort, Klas ^a   Schweitz, Jan Åke ^a   Simu, Urban ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ARCHITECTURAL DESIGN; COPPER; FLOW RATE; PARAFFIN WAXES; PARAFFINS; POLYIMIDES; POLYMERS; PUMPS; STAINLESS STEEL;

ACTIVE VALVES; FEM ANALYSES; FREQUENCY DEPENDENCES; HIGHER FREQUENCIES; LOW FREQUENCIES; LOW VOLTAGES; MAXIMUM FLOW RATES; MICROPUMP; MICROPUMPS; PARYLENE; PROCESS USING; PUMPING CHAMBERS; SQUARE PULSES; STAINLESS STEEL STENCILS; THERMO MECHANICALS;

COPPER CLAD STEEL;

EID: 58149328414     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/11/115009     Document Type: Article

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