A latchable paraffin actuated high-pressure microfluidic valve

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 29-32

  Ogden, S ^a   Boden R ^a,b   Hjort, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b MultusMEMS   (Sweden)

Author keywords

High pressure; Latchable valve; Microfluidic; Paraffin; Stainless steel

Indexed keywords

APPLIED PRESSURE; AVERAGE POWER; HIGH PRESSURE; INTEGRATED ACTUATOR; LATCHABLE VALVE; MAXIMUM PRESSURE; MICRO FLUIDIC APPLICATIONS; MICROFLUIDIC VALVES; VALVE HEADS; VALVE SEATS;

ACTUATORS; MICROFLUIDICS; MICROSYSTEMS; PARAFFIN WAXES; PARAFFINS; PIEZOELECTRIC TRANSDUCERS; STAINLESS STEEL;

SOLID-STATE SENSORS;

EID: 71549163777     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285573     Document Type: Conference Paper

References (11)

1. X. Wang, C. Cheng, S. Wang, S. Liu, "Electroosmotic pumps and their applications in microfluidic systems" Microfluid. Nanofluid., vol 6, pp 145-162, 2009
2. B. Yang and Q. Lin "A latchable microvalve using phase change of paraffin wax" Sensors Actuators A, vol 134, pp 194-200, 2007.
3. C. Goll, W. Bacher, B. Büstgens, D. Maas, W. Menz and W.K. Schomburg "Microvalves with bistable buckled polymer diaphragms" J. Micromech. Microeng., vol 6, pp 77-79, 1996.
4. J. Barth, T. Grund, B. Krevet and M. Kohl "A magnetic-force enhanced bistable shape memory microactuator" Proc. of Actuator '08, Bremen, June 9-11 2008, pp 386-389.
5. K.A. Shaikh, S. Li, and C. Liu "Development of a latchable microvalve employing a low-meltingtemperature metal alloy" J. Microelectromech. Syst., vol 17, pp 1195-1203, 2008.
6. M. Lehto, R. Bodén "A multi-stable miniature paraffin actuator" Proc. of Actuator '08, Bremen, June 9-11, 2008, pp 864-867.
7. L. Klintberg, M. Karlsson, L. Stenmark, J.-Å. Schweitz and G. Thornell "A large stroke, high force paraffin phase transition actuator" Sensors Actuators A, vol 96, pp 189-195, 2002.
8. E.T. Carlen and C.H. Mastrangelo "Electrothermally activated paraffin microactuators" J. Microelectromech. Syst., vol 11, pp 165-174, 2002.
9. J.S. Lee and S. Lucyszyn "Design and pressure analysis for bulk micromachined electrothermal hydraulic microactuators using a PCM" Sensors Actuators A, vol 133, pp 294-300, 2007.
10. R. Bodén, M. Lehto, J. Margell, K. Hjort and J.-Å. Schweitz "On-chip liquid storage and dispensing for lab-on-a-chip applications" J. Micromech. Microeng., vol 18, 075036, 2008.
11. R. Bodén, K. Hjort, J.-Å. Schweitz and U. Simu "A metallic micropump for high-pressure microfluidics" J. Micromech. Microeng., vol 18, 115009, 2008.