Simultaneous sensing and actuation with a piezoelectric tube scanner

Review of Scientific Instruments

Volumn 79, Issue 7, 2008, Pages

  Moheimani, S O Reza ^a   Yong, Yuen K ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTROLYSIS; METALLIZING; PIEZOELECTRICITY; SENSORS; TUBES (COMPONENTS);

CAPACITIVE SENSORS; CONTROL TECHNIQUES; DISPLACEMENT SENSORS; ELECTRODE PATTERNS; EXTERNAL-; INDUCTIVE SENSORS; MODE OF OPERATIONS; NANO-POSITIONING; NANOPOSITIONERS; NON-CONTACT; OPERATING RANGES; PIEZOELECTRIC TUBE SCANNERS; PIEZOELECTRIC VOLTAGE; SCANNING PROBE MICROSCOPES; THREE ORDERS OF MAGNITUDE; TUBE SCANNER;

SCANNING;

EID: 49149088160     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2952506     Document Type: Article

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