Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy

Integrated Ferroelectrics

Volumn 35, Issue 1-4, 2001, Pages 185-197

  Nam, Hyo Jin ^a   Cho, Seong Moon ^a   Yee, Youngjoo ^a   Lee, Heon Min ^a   Kim, Dong Chun ^a   Bu, Jong Uk ^a   Hong, Jaewan ^b  

^a LG   (South Korea)

^b PSIA Corporation   (South Korea)

Author keywords

AFM; Cantilever; Piezoelectric; PZT film; RuO2; Sol gel

Indexed keywords

ACTUATORS; ADHESION; ATOMIC FORCE MICROSCOPY; CAPACITORS; ELECTRIC PROPERTIES; ELECTRODES; IMAGE QUALITY; LEAD COMPOUNDS; NATURAL FREQUENCIES; RUTHENIUM COMPOUNDS; SOL-GELS;

CREEP DISTORTION; HIGH SPEED ATOMIC FORCE MICROSCOPY; TOP ELECTRODE;

PIEZOELECTRIC DEVICES;

EID: 0035027080     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580108016900     Document Type: Conference Paper

References (9)