Densification of amorphous sol-gel TiO2 films: An X-ray reflectometry study

Thin Solid Films

Volumn 518, Issue 14, 2010, Pages 3748-3753

  Vives, Serge ^a   Meunier, Cathy ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Densification; Sol gel deposition; Thin films; Titanium dioxide; X ray reflectometry

Indexed keywords

A-DENSITY; ANNEALED FILMS; ANNEALING TEMPERATURES; BOX MODELS; ELECTRON DENSITY PROFILES; FILM INTERFACES; FILM SURFACES; FITTING METHOD; GLANCING INCIDENCE X-RAY DIFFRACTIONS; HIGH DENSITY LAYERS; PACKING DENSITY; SODA LIME GLASS SUBSTRATE; SOL-GEL DEPOSITION; SOL-GEL TIO; TETRAISOPROPOXIDE; THREE-LAYER; X-RAY REFLECTOMETRY;

ANNEALING; BORN APPROXIMATION; DEPOSITION; GELS; OXIDES; REFLECTION; REFLECTOMETERS; SOL-GEL PROCESS; SOL-GELS; SOLS; SUBSTRATES; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; X RAY DIFFRACTION;

AMORPHOUS FILMS;

EID: 77950525339     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.10.116     Document Type: Article

References (36)

1. O'Regan B., and Gratzel M. Nature 353 (1991) 737
2. Carp O., Huisman C.L., and Reller A. Prog. Solid State Chem. 32 (2004) 33
3. Tang H., Prasad K., Sanjines R., and Levy F. Sens. Actuator B-Chem. 26/27 (1995) 71
4. Sorek Y., Reisfeld R., Finkelstein I., and Ruschins S. Appl. Phys. Lett. 63 (1993) 3256
5. Kersale Y., Vives S., Meunier C., and Giordano V. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50 (2003) 1662
6. Kommireddy D.S., Sriram S.M., Lvova Y.M., and Mills D.K. Biomaterials 27 (2006) 4296
7. Brinker C.J., and Scherer G.W. Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (1990), Academic Press Inc., San Diego
8. Brinker C.J., and Hurd A.J. J. Phys. III France 4 (1994) 1231
9. Scherer G.W. J. Sol-Gel Sci. Technol. 8 (1997) 353
10. Daillant J., and Gibaud A. X-ray and Neutron Reflectivity: Principles and Applications (1999), Springer, Berlin
11. Gibaud A., and Hazra S. Curr. Sci. 78 (2000) 1467
12. Lovell M.R., and Richardson R.M. Curr. Opin. Colloid Interface Sci. 4 (1999) 197
13. Sinha S.K. Curr. Opin. Solid State Mat. Sci. 1 (1996) 645
14. van der Lee A. Solid State Sci. 2 (2000) 257
15. Zhou X.L., and Chen S.H. Phys. Rep. 257 (1995) 223
16. Parrat L.G. Phys. Rev. 95 (1954) 359
17. Meunier C., Tomasella E., Vives S., and Mikhailov S. Diamond Relat. Mat. 10 (2001) 1491
18. Vives S., Meunier C., Boubekeur N., Kersale Y., and Giordano V. Appl. Surf. Sci. 253 (2007) 7131
19. Sanyal M.K., Basu J.K., Datta A., and Banerjee S. Europhys. Lett. 36 (1996) 265
20. Basu J.K., and Sanyal M.K. Phys. Rep. 363 (2002) 1
21. Lutterotti L. IUCr-CPD NewsLetter. 32 (2005) 53
22. Yu J., and Zhao X. Mater. Res. Bull. 35 (2000) 1293
23. Fernandez A., Lassaletta G., Jimenez V.M., Justo A., Gonzalez-Elipe A.R., Herrmann J.M., Tahiri H., and Ait-Ichou Y. Appl. Catal. B-Environ. 7 (1995) 49
24. Yuksel B., Sam E.D., Aktas O.C., Urgen M., and Cakir A.F. Appl. Surf. Sci. 255 (2009) 4001
25. Landau L.D., and Levich V.G. Acta Phys. Chim. URSS 17 (1942) 42
26. Bockmeyer M., Herbig B., and Löbmann P. Thin Solid Films 517 (2009) 1596
27. Md. Mosaddeq-ur-Rahman, G. Yu, T. Soga, T. Jimbo, H. Ebisu, M. Umeno, J. Appl. Phys. 88 (2000) 4634.
28. E. Gutmann, D.C. Meyer, A.A. Levin, P. Paufler, Appl. Phys. A 81 (2005) 249.
29. Kumar P.M., Badrinarayanan S., and Sastry M. Thin Solid Films 358 (2000) 122
30. Yu J., Zhao X., and Zhao Q. Thin Solid Films 379 (2000) 7
31. Kim S.Y. Appl. Optics 35 (1996) 6703
32. Bordia R.K., Zuo R., Guillon O., Salamone S.M., and Rödel J. Acta Mater. 54 (2006) 111
33. Guillon O., Krauß S., and Rödel J. J. Eur. Ceram. Soc. 27 (2007) 2623
34. Henrich B., Wonisch A., Kraft T., Moseler M., and Riedel H. Acta Mater. 55 (2007) 753
35. Green D.J., Guillon O., and Rödel J. J. Eur. Ceram. Soc. 28 (2008) 1451
36. Martin C.L., and Bordia R.K. Acta Mater. 57 (2009) 549