Density-modulated alumina-based nanometre films prepared by sol-gel technique

Applied Physics A: Materials Science and Processing

Volumn 81, Issue 2, 2005, Pages 249-259

  Gutmann, E ^a   Meyer, D C ^a   Levin, A A ^a   Paufler, P ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AMORPHOUS FILMS; COATINGS; DRYING; FILM PREPARATION; NANOSTRUCTURED MATERIALS; OPTICAL DEVICES; SOL-GELS; THERMODYNAMIC STABILITY; X RAY SCATTERING;

BRAGG REFLECTION; NANOMETER FILMS; SOL-GEL FILM; X RAY REFLECTOMETRY;

MULTILAYERS;

EID: 18844452975     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-005-3266-5     Document Type: Article

References (34)

1. E. Spiller: Soft X-ray Optics (SPIE Optical Engineering Press, Bellingham, WA 1994)
2. M. Berglund, L. Rymell, M. Peuker, T. Wilhein, H.M. Hertz: J. Microsc. 197, 268 (2000)
3. F. Schäfers, M. Mertin, D. Abramsohn, A. Gaupp, H.-C. Mertins, N.N. Salashchenko: Nucl. Instrum. Methods Phys. Res. Sect. A 467-468, 349 (2001)
4. H. Takenaka, H. Ito, K. Nagai, Y. Muramatsu, E. Gullikson, R.C.C. Perera: Nucl. Instrum. Methods Phys. Res. Sect. A 467-468, 341 (2001)
5. A. Nefedov, H. Zabel, E Schäfers: Nucl. Instrum. Methods Phys. Res. Sect. A 467-468, 345 (2001)
6. A.A. Levin, D.C. Meyer, A. Gorbunov, A. Tselev, P. Gawlitza, H. Mai, W. Pompe, P. Paufler: Thin Solid Films 391, 47 (2002)
7. T. Leisegang, D.C. Meyer, A.A. Levin, S. Braun, P. Paufler: Appl. Phys. A 77, 965 (2003)
8. A. Baranov, R. Dietsch, T. Holz, M. Menzel, D. Weißbach, R. Scholz, J. Schreiber: Proc. SPIE 4782, 160 (2002)
9. K. Daoudi, B. Canut, M.G. Blanchin, C.S. Sandu, V.S. Teodorescu, J.A. Roger: Thin Solid Films 445, 20 (2003)
10. A.P. Rizzato, C.V. Santilli, S.H. Pulcinelli: J. Non-Cryst. Solids 247, 158 (1999)
11. A.P. Rizzato, C.V. Santilli, S.H. Pulcinelli: J. Sol-Gel Sci. Technol. 19, 811 (2000)
12. J. Gottmann, E.W. Kreutz: Surf. Coat. Technol. 116-119, 1189 (1999)
13. I. Tsarenko, S. Park, H. Du, W.Y. Lee: J. Am. Ceram. Soc. 86, 1622 (2003)
14. Y.-C. Chen, X. Al, C.-Z. Huang: Mater. Sci. Eng. B 77, 221 (2000)
15. J.W. Lee, C.W. Won, B.-S. Chun, H.Y. Sohn: J. Mater. Res. 8, 3151 (1993)
16. J. Masalski, J. Gluszek, J. Zabrzeski, K. Nitsch, P. Gluszek: Thin Solid Films 349, 186 (1999)
17. E.P. Gusev, M. Copel, E. Cartier, U.R. Baumvol, C. Krug, M.A. Gribelyuk: Appl. Phys. Lett. 76, 176 (2000)
18. R. Nass, H. Schmidt: J. Non-Cryst. Solids 121, 329 (1990)
19. N. Bahlawane, T. Watanabe: J. Am. Ceram. Soc. 83, 2324 (2000)
20. K. Tadanaga, N. Katata, T. Minami: J. Am. Ceram. Soc. 80, 3213 (1997)
21. Q. Fu, C.-B. Cao, H.-S. Zhu: Thin Solid Films 348, 99 (1999)
22. Y. Kurokawa, T. Suga, S. Nakata, T. Ikoma, S. Tero-Kubota: J. Mater. Sci. Lett. 17, 275 (1998)
23. B.E. Yoldas: Ceram. Bull. 54, 289 (1975)
24. S.L. Morelhão, G.E.S. Brito, E. Abramof: Appl. Phys. Lett. 80, 407 (2002)
25. M. Mukherjee, N. Deshmukh, S.K. Kulkarni: Appl. Surf. Sci. 218, 323 (2003)
26. K.A. Ritley, K.-P. Just, F. Schreiber, H. Dosch, T.P. Niesen, F. Aldinger: J. Mater. Res. 15, 2706 (2000)
27. S. Grassl, D. Fuchs: computer program 'REF-SIM', Siemens AG (1994)
28. L.G. Parrat: Phys. Rev. 95, 359 (1954)
29. S.K. Sinha, E.B. Sirota, S. Garoff, H.B. Stanley: Phys. Rev. B 38, 2297 (1988)
30. Powder Diffraction File 2, ICDD (1996)
31. E. Gutmann, A.A. Levin, I. Pommrich, D.C. Meyer: Cryst. Res. Technol. 40, 114 (2005)
32. D.C. Meyer, A.A. Levin, P. Paufler: Thin Solid Films, accepted
33. L. Landau, B. Levich: Physicochim. URSS 17, 42 (1942)
34. M. Guglielmi, S. Zenezini: J. Non-Cryst. Solids 121, 303 (1990)