Sintering of Sol-Gel Films

Journal of Sol-Gel Science and Technology

Volumn 8, Issue 1-3, 1997, Pages 353-363

  Scherer, George W ^a  

^a DUPONT COMPANY   (United States)

Author keywords

Constraint; Crystallization; Film; Nucleation; Rapid thermal annealing; Sintering; Stress; Substrate

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; CRYSTALLIZATION; DEGRADATION; DENSIFICATION; DENSITY (SPECIFIC GRAVITY); NUCLEATION; SINTERING; STRESSES; SUBSTRATES; THIN FILMS;

SOL GEL FILMS;

SOL-GELS;

EID: 0030654695     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02436865     Document Type: Article

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