|
Volumn 64, Issue 11, 2010, Pages 1268-1270
|
Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array
|
Author keywords
Carbonized Si NPA; Humidity sensor; SiC Si NPA
|
Indexed keywords
A-THERMAL;
CARBONIZED SI-NPA;
CHEMICAL CHARACTERISTIC;
DESORPTION DYNAMICS;
ELECTRONIC DEVICE;
GRAPHITE VACUUM FURNACE;
RECOVERY TIME;
RELATIVE HUMIDITIES;
ROOM TEMPERATURE;
SCANNING ELECTRON MICROSCOPE;
SENSING PERFORMANCE;
SENSING PROPERTY;
SILICON NANOPOROUS PILLAR ARRAY;
TESTING FREQUENCIES;
VAPOR ADSORPTION;
X RAY DIFFRACTOMETERS;
ATMOSPHERIC HUMIDITY;
CAPACITANCE;
DESORPTION;
DYNAMIC RESPONSE;
GAS ADSORPTION;
HUMIDITY SENSORS;
MOISTURE;
MORPHOLOGY;
SCANNING ELECTRON MICROSCOPY;
SILICON CARBIDE;
SURFACE STRUCTURE;
VACUUM FURNACES;
X RAY DIFFRACTION;
SILICON;
|
EID: 77950520071
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2010.03.005 Document Type: Article |
Times cited : (10)
|
References (18)
|