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Volumn 64, Issue 11, 2010, Pages 1268-1270

Capacitive humidity-sensitivity of carbonized silicon nanoporous pillar array

Author keywords

Carbonized Si NPA; Humidity sensor; SiC Si NPA

Indexed keywords

A-THERMAL; CARBONIZED SI-NPA; CHEMICAL CHARACTERISTIC; DESORPTION DYNAMICS; ELECTRONIC DEVICE; GRAPHITE VACUUM FURNACE; RECOVERY TIME; RELATIVE HUMIDITIES; ROOM TEMPERATURE; SCANNING ELECTRON MICROSCOPE; SENSING PERFORMANCE; SENSING PROPERTY; SILICON NANOPOROUS PILLAR ARRAY; TESTING FREQUENCIES; VAPOR ADSORPTION; X RAY DIFFRACTOMETERS;

EID: 77950520071     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2010.03.005     Document Type: Article
Times cited : (10)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.