Porous SiC layers on Si nanowire surface

Microelectronics Journal

Volumn 39, Issue 3-4, 2008, Pages 507-511

  Diaz Cano, A I ^a   Torchynska, T V ^a   Urbina Alvarez, J E ^b   Paredes Rubio, G R ^b   Jimenez Sandoval S ^b   Vorobiev, Y V ^b  

^a INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^b DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Carbonization; Porous Si; Porous SiC; Raman scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBONIZATION; CHARACTERIZATION; CRYSTAL STRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; POROUS SILICON; RAMAN SCATTERING; SILICON CARBIDE; SURFACE MORPHOLOGY;

CRYSTALLINE STRUCTURE; WIRE STRUCTURE;

NANOWIRES;

EID: 40649089454     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.07.069     Document Type: Article

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