Resistive humidity sensitivity of arrayed multi-wall carbon nanotube nests grown on arrayed nanoporous silicon pillars

Sensors and Actuators, B: Chemical

Volumn 125, Issue 2, 2007, Pages 651-655

  Jiang, Wei Fen ^a   Xiao, Shun Hua ^a   Feng, Chun Yue ^a   Li, Hua Yang ^a   Li, Xin Jian ^a  

^a ZHENGZHOU UNIVERSITY   (China)

Author keywords

Carbon nanotube (CNT); CNT Si NPA; Device response; Resistive humidity sensor; Silicon nanoporous pillar array (Si NPA)

Indexed keywords

DEVICE RESPONSES; RESISTIVE HUMIDITY SENSORS; SILICON NANOPOROUS PILLAR ARRAY (SI-NPA);

ATMOSPHERIC HUMIDITY; CHEMICAL VAPOR DEPOSITION; GROWTH (MATERIALS); NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON; THERMAL EFFECTS;

MULTIWALLED CARBON NANOTUBES (MWCN);

EID: 34447644212     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.03.015     Document Type: Article

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