Structural and capacitive humidity sensing properties of nanocrystal magnetite/silicon nanoporous pillar array

Sensors and Actuators, B: Chemical

Volumn 110, Issue 2, 2005, Pages 260-263

  Wang, Hai Yan ^a   Li, Xin Jian ^a  

^a ZHENGZHOU UNIVERSITY   (China)

Author keywords

Capacitive humidity sensor; Hierarchical structure; Nanocrystal magnetite (nc Fe 3O 4); Silicon nanoporous pillar array (Si NPA)

Indexed keywords

HIERARCHICAL STRUCTURE:CAPACITIVE HUMIDITY SENSOR; MICRON DIMENSION; NANOCRYSTAL MAGNETITE (NC-FE3O4); SILICON NANOPOROUS PILLAR ARRAY (SI-NPA);

CAPACITANCE; HIERARCHICAL SYSTEMS; HUMIDITY CONTROL; MAGNETITE; NANOSTRUCTURED MATERIALS; REAL TIME SYSTEMS; SENSITIVITY ANALYSIS;

SILICON SENSORS;

EID: 23844483254     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.02.004     Document Type: Article

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